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Overhead Hoist Transporter

Equipment Description
OHT (Overhead Hoist Transporter) is a vehicle that can travel on an aerial track and "directly" enter the loading and unloading ports of storage equipment or process equipment by means of a belt-driven lifting mechanism, and is used for internal transportation within the process area, mainly for handling wafers, and also for inter-process or inter-plant transportation.
Equipment Features
  • Customized aerial rail with small turning radius
  • Dual-track traveling design
  • Compact and lightweight design
Equipment Parameters
Product Range FOUP, FOSB, Megazine, Tray, Cassette
Rated Load Max20Kg
Running Speed Straight 3.5m/sec, Turning 0.7m/sec
Increase speed 0.9m/sec
Turning Radius R500mm (45˚, 90 ˚)
Clean Environment Class 100 - Class 1000