STK Foup Stocker

Equipment Description

FOUP Stocker is an automated storage warehouse for semiconductor factories with multi-layer storage space, which is mainly used for automated transfer and storage of FOUP in semiconductor factories to realize the flow of wafers between processes.

Equipment Features

High density storage management
Small white dot self-learning pick-and-place control
Compact, lightweight design

Equipment Parameters

Product Range	FOUP, FOSB, Megazine, Tray, Cassette
Rated Load	Max20Kg
Motion Control	X-axis, Z-axis, R-axis, fork telescoping axis
Movement Speed	X-axis 120m/min, Z-axis 120m/min
Fork Cycle	2sec
Clean Environment	Class 100 - Class 1000